More information：http://eshare.shanghaitech.edu.cn/spst/rnm/
编号 | 仪器名称 | 仪器名称（英文） | 图片 | 型号 | 生产厂家 | 设备状态 |
1 | 等离子体增强化学气相沉积PECVD | OXFORD NGP80 PECVD |
| OXFORD NGP80 PECVD | OXFORD | 已购置 |
2 | 原子层沉积系统 | Atomic Layer Deposition | Savannah | VEECO | 2019年招投标 | |
3 | 电子束蒸发 | E-beam Evaporator |
| PRO Line PVD 75 | Kurt J. Lesker | 2019年招投标 |
4 | 磁控溅射系统 | Magnetron sputtering system |
| PRO Line PVD 75 | Kurt J. Lesker | 已购置 |
5 | 快速热处理系统 | Rapid Thermal Annealer |
| AccuThermo AW610 | Allwin21.corp | 已购置 |
6 | 台阶仪 | Surface Profiler |
| Dektak XT | BrukerStylus Profiler | 已购置 |
7 | 椭偏仪 | Ellipsometer |
| SE850DUV | SENTECH | 2019年招标 |
8 | 光学显微镜 | Optical Microscope |
| Axio Lab.A1，ZEISS | ZEISS | 已购置 |
9 | 原子力显微镜 | Atomic Force Microscope |
| Cypher S | Asylum Research | 已购置 |
10 | 膜厚测量系统 | Film Thickness Measurement System |
| TohoSpec3100 | Toho Technology Corporation/Japan | 已购置 |
11 | 半导体器件分析仪 | Semiconductor Parameter Analyzer |
| KeySight B1500A | Keysight Technologies | 已购置 |
12 | 探针台 | Probe Station |
| Signatone S1160 | Signatone | 已购置 |
13 | 聚合物光刻系统 | Polymer Pen Lithography System |
| TERA-print M | TERA-print | 已购置 |
14 | 临界点干燥仪 | Critical Point Dryer |
| Tousimis Autosamdri-815B Series C | Tousimis | 已购置 |
15 | 晶圆切割机 | Wafersaw |
| DISCO DAD323 | 已购置 | |
16 | 接触角 | Contact Angle Measurement Instrument (tensiometer) |
| SL200KS | Kino | 已购置 |
17 | 微控楔键合机 | Wirebonder |
| West Bond 7476E | West Bond | 已购置 |
18 | 腐蚀清洗台 | Wet Bnech |
| SFQ-604SKSX | 中国电子科技集团公司第四十五研究所 | 已购置 |
19 | 烤胶机-1 | Hot plate-1 |
| Mycro HP1000-1+Rocker300 | Mycro | 已购置 |
20 | 烤胶机-2 | Hot plate-2 |
| Mycro NDK-1K | Mycro | 已购置 |
21 | 紫外曝光机 | Ultraviolet exposure machine-1 |
| S?SS MJB4 | 已购置 | |
22 | 激光直写光刻系统 | Laser direct writing lithography system |
| Quantum Design Microwriter ML3 | 已购置 | |
23 | 3D共聚焦激光显微镜 | 3D Material Confocal Microscope |
| Zeiss LSM800 | Zeiss | 已购置 |
24 | 氦离子聚焦离子束显微镜 | Helium Ion Microscope‐Focused Ion Beam |
| Zeiss ORION NanoFab | Zeiss | 采购中 |
25 | HMDS真空烘箱 | HMDS Oven |
| Yes 310TA | 已购置 | |
26 | 匀胶旋涂仪 | Spin Coater |
| Laurell WS 650 | 已购置 | |
27 | Wafab显影槽 | Wafab Developing Bench |
| Wafab Manual | 已购置 | |
28 | Wafab剥离槽 | Wafab Lift-off Bench |
| Wafab Manual | 已购置 | |
29 | Wafab湿式清洗槽 | Wafab Acid Etching Bench |
| Wafab Manual | 已购置 | |
30 | 甩干机 | / |
| / | 奥曼特 | 已购置 |
31 | 反应离子刻蚀 | Reactive Ion Etch |
| Advanced Vacuum VISION 322 | 已购置 | |
32 | 离子束刻蚀 | Ion Beam Mill |
| Intlvac Nanoquest I | 已购置 | |
33 | 薄膜应力测试系统 | Stress measurement system |
| Toho FLX2320S | 已购置 | |
34 | 紫外固化炉 | UV-Ozone |
| Samco UV-2 | 已购置 |
